发明名称 |
Torsion spring for MEMS structure |
摘要 |
A torsion spring for a micro-electro-mechanical system (MEMS) structure is provided. The torsion spring is connected between a pivoting member and a fixed member and supports the pivoting member so that the pivoting member can pivot about the torsion spring. The torsion spring includes: a horizontal beam; at least one vertical beam formed on the horizontal beam; and a plurality of auxiliary beams formed on the horizontal beam and parallel to the vertical beam.
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申请公布号 |
US2007120207(A1) |
申请公布日期 |
2007.05.31 |
申请号 |
US20060582481 |
申请日期 |
2006.10.18 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
JEONG HEE-MOON;KO YOUNG-CHUL |
分类号 |
H01L29/84 |
主分类号 |
H01L29/84 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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