| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for removing an electrically conductive metal oxide thin film without leaving marks, stress deformation or the like. SOLUTION: Positive electrodes 13 and negative electrodes 14 are alternatively arranged in a plurality of pairs so as to be opposed to the electrically conductive metal oxide thin film 12 formed on the surface of a base material 11. Thereafter, in a state where an electrolytic solution 15 is interposed among the positive electrodes 13, the negative electrodes 14 and the electrically conductive metal oxide thin film 12, voltage is applied to both the electrodes 13, 14 from a power source 16. By this operation, the electrically conductive oxide thin film 12 on the surface of the base material 11 is removed by reduction reaction. COPYRIGHT: (C)2007,JPO&INPIT
|
