NANO STAGE COMPRISED OF DUAL SERVO MECHANISM

摘要

A nano stage apparatus is provided to realize a high resolving power by embodying a dual operation structure using a piezo actuator on at least one end portion of a driving shaft. A nano stage apparatus includes a stage capable of moving according to the rotation of a driving shaft(110). Piezo actuators(120a,120b) are installed on the driving shaft, so that the stage is capable of being moved by using a dual operation structure of the driving shaft and piezo actuators. The piezo actuators are installed between the driving shaft and a fixing portion for assisting the rotation of the driving shaft. The piezo actuator has a groove for inserting the driving shaft and a bearing for fixing the driving shaft.