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发明名称
摘要
申请公布号
JP3920863(B2)
申请公布日期
2007.05.30
申请号
JP20040076952
申请日期
2004.03.17
申请人
发明人
分类号
H01L21/8246;H01L27/10;H01L27/105;H01L43/08
主分类号
H01L21/8246
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