发明名称 |
SENSOR-EQUIPPED JOINT MEMBER |
摘要 |
<p>The present invention provides a joint member which suppresses the increase of the number of members and enables the provision of a further compactified integrated fluid control apparatus. A sensor-equipped joint member 10 includes a channel block 41 including a V-shaped channel 41a formed therein for communicating adjacent fluid control devices 16 and 20 to each other at their lower-end openings, and a pressure sensor 42 provided on a side surface of the channel block 41. The channel block 41 is provided with a branched channel 41b which is branched from the V-shaped channel 41a and is communicated to the pressure sensor 42.</p> |
申请公布号 |
EP1790898(A1) |
申请公布日期 |
2007.05.30 |
申请号 |
EP20050780991 |
申请日期 |
2005.08.26 |
申请人 |
FUJIKIN INCORPORATED |
发明人 |
SHINOHARA, TSUTOMU;YAMAJI, MICHIO;TANAKA, SHIGEAKI;KOYOMOGI, MUTSUNORI;MINE, ICHIRO;TOKUDA, ICHIRO;TSUBOTA, KENJI |
分类号 |
F16L25/00;F16K27/00;G05D7/00 |
主分类号 |
F16L25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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