摘要 |
PURPOSE:To adjust simply the resonance frequency by adding a mass on the surface of a piezoelectric base. CONSTITUTION:Interdigital transducer electrodes are adhered on a piezoelectric base. The mass is added by using a mask 4 on which a face corresponding to a part where the surface wave on an SAW resonator or an SAW filter substrate is enclosed or propagated is opened. A metal is vapor-deposited by operating the SAW device and monitoring the frequency. As the mass to be added, a nonmetallic magnesium fluoride or quartz can be used. This method is applied to an SSBW having interdigital transducer electrodes, and a device utilizing Love, SH, Breustein-Gulyaev and Shimizu waves as well as the SAW device. |