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发明名称
Film deposition system and film deposition method using the same
摘要
申请公布号
EP1435400(B1)
申请公布日期
2007.05.30
申请号
EP20030023080
申请日期
2003.10.14
申请人
KABUSHIKI KAISHA KOBE SEIKO SHO
发明人
FUJII, HIROFUMI;KUMAKIRI, TADASHI;SHIMOJIMA, KATUHIKO
分类号
C23C14/32;C23C14/50;C23C14/54;C23C16/458;H01J37/32
主分类号
C23C14/32
代理机构
代理人
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