Capacitive ultrasonic transducer and method of fabricating the same

摘要

A capacitive ultrasonic transducer (30) that includes a first electrode (31), an insulating layer (32) formed on the first electrode, at least one support frame (38) formed on the insulating layer, and a second electrode (35) formed spaced apart from the first electrode, wherein the first electrode and the second electrode define an effective area of oscillation of the capacitive ultrasonic transducer, and the respective length of the first electrode and the second electrode defining the effective area of oscillation is substantially the same.