发明名称 Method of fabricating tetra-polar field-emission display
摘要 A method of fabricating a tetra-polar field-emission display, using a shadow mask to form an opening of a converging electrode, so as to improve converging effect of an electron beam propagating through the opening. An anode electrode structure and a cathode electrode structure are formed. The cathode electrode structure includes a first dielectric layer, a gate layer, a second dielectric layer and a converging layer on a substrate. The converging layer, the second dielectric layer, the gate layer and the first dielectric layer are patterned to form a window exposing the substrate. A cathode electrode layer is formed on the substrate exposed by the window. The converging layer is patterned into n converging electrode having a top surface, a bottom surface, and a pair of side surfaces. The side surfaces are so configured that the window is gradually reduced from the top surface towards a turning point between the top surface and the bottom surface, and then gradually enlarged from the turning point towards the bottom surface.
申请公布号 US7223148(B2) 申请公布日期 2007.05.29
申请号 US20040934593 申请日期 2004.09.03
申请人 TECO NANOTECH CO., LTD. 发明人 YANG FRANK
分类号 H01J9/00;H01J1/304;H01J9/02;H01J29/46;H01J29/48;H01J31/12 主分类号 H01J9/00
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