发明名称 X-ray optical apparatus
摘要 An X-ray optical apparatus comprises an X-ray optical system which is capable of projecting an enlarged sample image by soft X-rays and a visible optical system to observe the sample with a visible radiation. To enable simultaneous observation using both optical systems, the systems utilize a common objective zone plate. The objective zone plate includes a base plate having an opening at the center thereof to pass the soft X-rays which have passed through the sample and also having a visible radiation passing section to the outside of the opening. A zone plate is supported centrally on the base plate for converging soft X-rays which have passed through the sample and forming the sample image at a predetermined position. An eyepiece is provided in a position displaced from the X-ray optical axis to enable visual observation of the sample with the light passed through the visible radiation transmitting section of the objective zone plate.
申请公布号 US5119411(A) 申请公布日期 1992.06.02
申请号 US19900632941 申请日期 1990.12.24
申请人 NIKON CORPORATION 发明人 NAKAMURA, HAJIME
分类号 G21K1/06;G01Q30/04;G21K7/00 主分类号 G21K1/06
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