摘要 |
An X-ray optical apparatus comprises an X-ray optical system which is capable of projecting an enlarged sample image by soft X-rays and a visible optical system to observe the sample with a visible radiation. To enable simultaneous observation using both optical systems, the systems utilize a common objective zone plate. The objective zone plate includes a base plate having an opening at the center thereof to pass the soft X-rays which have passed through the sample and also having a visible radiation passing section to the outside of the opening. A zone plate is supported centrally on the base plate for converging soft X-rays which have passed through the sample and forming the sample image at a predetermined position. An eyepiece is provided in a position displaced from the X-ray optical axis to enable visual observation of the sample with the light passed through the visible radiation transmitting section of the objective zone plate.
|