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发明名称
EPITAXIEWACHSTUMSVERFAHREN UND VORRICHTUNG.
摘要
申请公布号
DE3780664(D1)
申请公布日期
1992.09.03
申请号
DE19873780664
申请日期
1987.02.13
申请人
NIPPON TELEGRAPH AND TELEPHONE CORP., TOKIO/TOKYO, JP
发明人
MORI, MINAMIOGIKUBO, HIDEFUMI 4-16-8, TOKYO, JP;TSUZUKI, HAMADACHO, NOBUYORI 4-10, KANAGAWA, JP;YAMAMOTO, JOSUIHONCHO, MITSUO 1282, TOKYO, JP
分类号
H01L21/205;C30B25/14;C30B25/18;(IPC1-7):C30B25/14;C30B29/40
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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