LASER MICROMACHINING METHODS AND SYSTEMS USING A LIQUID AS AN ASSIST MEDIUM.

摘要

A method of laser machining a substrate is provided. The method comprises directinglaser energy (420) at a first surface of the substrate (400), while providingan assist medium (450,452) at the first surface of the substrate (400) at leastat approximately the area at which the laser energy (420) is being directed. Theassist medium (450,452) is no longer provided prior to completion of formationof a feature in the substrate (400) created utilizing the laser energy (420).