| 摘要 |
A teaching apparatus and a teaching method that facilitates accurately setting a retainer at a target position, and minimizes troublesome steps in the manufacturing process, are to be provided. The teaching apparatus includes a first member held by the retainer of the carrying apparatus, a second member attached to the wafer boat (mounting rack) so as to oppose the first member held by the retainer when the retainer is set close to the target position, an output unit, and an arithmetic unit. The first member includes a distance sensor that generates a sensor signal representing a distance between the distance sensor and a surface of the second member opposing the first member. On the surface of the second member opposing the first member, a reference mark A is provided. The first member includes an imaging device that shoots an image including the reference mark A, and generates image data.
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