发明名称 Formation of contacts on semiconductor substrates
摘要 Embodiments of the invention are concerned with a method of manufacturing a radiation detector having one or more conductive contacts on a semiconductor substrate, and comprise the steps of: applying a first conductive layer to a first surface of the semiconductor substrate: applying a second conductive layer to form a plurality of contiguous layers of conductive materials, said plurality of contiguous layers including said first conductive layer: and selectively removing parts of said plurality of contiguous layers so as to form said conductive contacts, the conductive contacts defining one or more radiation detector cells in the semiconductor substrate.
申请公布号 US2007117255(A1) 申请公布日期 2007.05.24
申请号 US20030532118 申请日期 2003.10.23
申请人 PUHAKKA KIMMO 发明人 PUHAKKA KIMMO
分类号 H01L21/00;H01L29/768;H01L31/00;H01L31/0224;H04N3/00;H04N3/15 主分类号 H01L21/00
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