| 摘要 |
PROBLEM TO BE SOLVED: To provide a decompression processing device which keeps an evacuation speed adequately controlled, a particle is prevented from generating and a depressurized space is efficiently evacuated. SOLUTION: In the decompression processing device, the internal space of a decompressed container to hold a substrate to be processed is dischargeably formed at different evacuation speeds. The decompression processing device comprises a high-speed evacuating line to evacuate the internal space, a low-speed evacuating line to evacuate the internal space, a first pressure measuring device to measure the pressure in the internal pressure, and a second pressure measuring means to measure the pressure in the low-speed evacuating line. The decompression processing device is provided with a pressure regulating means to supply pressure regulating gas into the low-speed evacuating line corresponding to the pressure difference between the internal space and the low-speed evacuating line. COPYRIGHT: (C)2007,JPO&INPIT
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