| 摘要 |
PROBLEM TO BE SOLVED: To suppress disconnection between a macro circuit in which a plurality of fine wirings of not more than 0.1μm are provided densely and a large-diameter lead-out wiring connected to the fine pieces of wiring of this macro circuit. SOLUTION: Three pieces M2 of wiring 103 are connected in parallel at an end of a TEG (test element group) region 101 of a lead-out wiring 102. COPYRIGHT: (C)2007,JPO&INPIT |
