| 摘要 |
PROBLEM TO BE SOLVED: To provide a compact and inexpensive transporting device suitable for use in a clean room, capable of suppressing generation of dust and reducing floor area to be required. SOLUTION: The transporting device 100 has a first stage block J1 provided with stages J1s for loading a pallet arranged at even intervals in a longitudinal direction, a second stage block J2 movable in the longitudinal direction as a whole provided with stages J2s arranged at the same intervals as the first stage block J1s in the longitudinal direction to face against the stages J1s, a pallet moving mechanism H3 for gripping pallets on the stages J1s and the stages J2s and moving a stage for loading between the first stage block J1 and the second stage block J2, a pallet feeding stage P1 for loading a pallet supplied from outside on a predetermined feeding stage and a pallet take-out mechanism O2 for taking out a pallet on a predetermined take-out stage to outside. COPYRIGHT: (C)2007,JPO&INPIT
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