发明名称 SEMICONDUCTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
摘要 A method of manufacturing a semiconductor substrate can effectively prevent a chipping phenomenon and the production of debris from occurring in part of the insulation layer and the semiconductor by removing a outer peripheral portion of the semiconductor substrate so as to make the outer peripheral extremity of the insulation layer to be located between the outer peripheral extremity of the semiconductor layer and that of the support member and hence the semiconductor layer and the insulation layer produce a stepped profile.
申请公布号 US2007114609(A1) 申请公布日期 2007.05.24
申请号 US20070625497 申请日期 2007.01.22
申请人 发明人 AKINO YUTAKA;ATOJI TADASHI
分类号 H01L27/12 主分类号 H01L27/12
代理机构 代理人
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