Object e.g. multilayered system, total reflection coefficient calculating method for use during production of semiconductor, involves computing complex cosine using specific equation

摘要

The method involves iteratively calculating Fresnel coefficient and boundary layers for polarization direction as well as a complex function with complex cosine as an argument, for multiple wavelengths and a number of supporting points for all layers of objects. The complex cosine is computed with a specific equation. The solution of two of the quadrants of a gauss level is utilized for drawing the radical.