发明名称 POWDER FOR THERMAL SPRAYING AND METHOD FOR FORMING THERMALLY SPRAYED COATING
摘要 <P>PROBLEM TO BE SOLVED: To provide powder for thermal spraying suitable for forming a thermally sprayed coating having excellent plasma etching resistance, and to provide a method for forming the thermally sprayed coating. <P>SOLUTION: The powder for thermal spraying comprises yttria particles and alumina particles. The content of the alumina particles in the powder for thermal spraying is 50 to 3,000 ppmv. The yttria particles are preferably composed of yttria-granulated-sintered particles, and the average particle diameter of the yttria particles is preferably 20 to 60 &mu;m. The alumina particles are preferably composed of transition alumina, and the average particle diameter of the alumina particles is preferably &le;1 &mu;m. The powder for thermal spraying is preferably used for atmospheric pressure plasma spraying. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007126711(A) 申请公布日期 2007.05.24
申请号 JP20050320117 申请日期 2005.11.02
申请人 FUJIMI INC 发明人 KITAMURA JUNYA;AOKI ISAO
分类号 C23C4/10;B05D1/08;H01L21/3065 主分类号 C23C4/10
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