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发明名称
FORMATION OF THIN FILM
摘要
申请公布号
JPH0959086(A)
申请公布日期
1997.03.04
申请号
JP19950217100
申请日期
1995.08.25
申请人
MINOLTA CO LTD
发明人
HAYAMIZU SHUNICHI;KAWAI TOMOJI;TABATA HITOSHI
分类号
C30B23/00;B01J19/12;H01L21/203;H01L21/31;(IPC1-7):C30B23/00
主分类号
C30B23/00
代理机构
代理人
主权项
地址
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