发明名称 MEMS MICROPHONE, PRODUCTION METHOD AND METHOD FOR INSTALLING
摘要 The invention relates to a microphone with a miniaturized design that, on a first surface of a flat carrier substrate, supports an electroacoustic transducer placed above a recess of the carrier substrate. On the second surface of the carrier substrate, the recess is spanned by a cap, which rests upon the carrier substrate and tightly seals with the surface of the carrier substrate and which has at least one metallic layer for electromagnetically shielding. Semiconductor components can be placed under the cap that assist or ensure the function of the microphone.
申请公布号 WO2007054071(A1) 申请公布日期 2007.05.18
申请号 WO2006DE01946 申请日期 2006.11.06
申请人 EPCOS AG;PAHL, WOLFGANG 发明人 PAHL, WOLFGANG
分类号 H04R19/00 主分类号 H04R19/00
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