发明名称 |
POLYCRYSTALLINE SILICON LAYER, FLAT PANEL DISPLAY USING THE POLYSCRYSTALLINE SILICON LAYER AND METHOD FOR FABRICATING THE SAME |
摘要 |
A polycrystalline silicon layer, a flat panel display using the polycrystalline silicon layer, and a method of fabricating the same are provided. The polycrystalline silicon layer is formed by crystallizing a seed region of an amorphous silicon layer using a super grain silicon (SGS) crystallization technique. The crystallinity of the seed region spread into a crystallization region beyond the seed region. The crystallization region is formed into a semiconductor layer that can be incorporated to make a thin film transistor to drive flat panel displays. The semiconductor layer made by the method of the present invention provides uniform growth of grain boundaries, and characteristics of a thin film transistor made of the semiconductor layer are improved. |
申请公布号 |
KR100721957(B1) |
申请公布日期 |
2007.05.18 |
申请号 |
KR20050122628 |
申请日期 |
2005.12.13 |
申请人 |
SAMSUNG SDI CO., LTD. |
发明人 |
YANG, TAE HOON;LEE, KI YONG;SEO, JIN WOOK;PARK, BYOUNG KEON |
分类号 |
H05B33/22;H05B33/10 |
主分类号 |
H05B33/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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