PHOTORESIST INJECTION NOZZLE OF SPINNER APPARATUS,申请号KR20050109160-传众专利搜索

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发明名称	PHOTORESIST INJECTION NOZZLE OF SPINNER APPARATUS
摘要
申请公布号	KR20070051509(A)	申请公布日期	2007.05.18
申请号	KR20050109160	申请日期	2005.11.15
申请人	SAMSUNG ELECTRONICS CO., LTD.	发明人	BAEK, JONG KI
分类号	H01L21/027	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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