发明名称 |
HEAVY OBJECT TURNING APPARATUS |
摘要 |
The present invention provides a technique of a heavy obj ect turning apparatus that is compact, that is enabled to reduce the distance between the center of gravity of a heavy object s and a pivot positioned on an axis, and that is configured so that a turning arm and a drive unit has a length in the direction of an axis passing through the pivot around which the heavy object is turned. A control unit 12 fixes a support base 13 onto a stand 3. An orthogonal axis reduction gear 6 serving as ananterior reduction gear is disposed on the front surface of a posterior reduction gear 26. The orthogonal axis reduction gear 6 has a configuration in which an output shaft is on an axis A of a planetary gear type reduction gear serving as the posterior reduction gear, and in which an input shaft is perpendicular to the axis A . The orthogonal axis reduction gear 6 is constituted by a hypoid reduction gear or a worm-geared reduction gear. A motor 16 is disposed on the bottom surface of the orthogonal axis type reduction gear 6. The bottom portion of the motor 6 is interposed between the gear 6 and the stand 3. The motor shaft of the motor 16 is connected to a gear portion including the hypoid gear or a worm wheel of the orthogonal axis reduction gear 6.
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申请公布号 |
EP1785735(A1) |
申请公布日期 |
2007.05.16 |
申请号 |
EP20050781386 |
申请日期 |
2005.09.02 |
申请人 |
TOKYO ELECTRON LIMITED;NABTESCO CORPORATION |
发明人 |
YUDATE, TOSHIHIRO;AKIYAMA, SHUJI;YAMADA, HIROSHI;KAMEDA, NOBUHIRO |
分类号 |
G01R31/28;G01R31/26;H01L21/66 |
主分类号 |
G01R31/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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