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发明名称
PLASMA SOURCE OF DIRECTED BEAMS AND APPLICATION THEREOF TO MICROLITHOGRAPHY
摘要
申请公布号
EP1673785(B1)
申请公布日期
2007.05.16
申请号
EP20040817228
申请日期
2004.10.18
申请人
EPPRA
发明人
CHOI, PETER
分类号
G21K1/06;G03F7/20;H05G2/00
主分类号
G21K1/06
代理机构
代理人
主权项
地址
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