Charged particles conducting device, has electrodes arranged for formation of modules at carrier unit, where module is detachably fixed in evacuatable housing and removed from housing under holding fixing of electrodes at carrier unit

摘要

The device has a number of electrodes (1) with openings (2) for passage charged particles and arranged for formation of a deck-like ion-funnel. The electrodes are arranged in an evacuatable housing (9) and are arranged for formation of module at a carrier unit (7). The module is detachably fixed in the housing and is removed from the housing under holding the fixing of the electrodes at the carrier unit.