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发明名称
PRODUCTION METHOD OF AN ELECTRODE ARRANGEMENT FOR CHARGE STORAGE
摘要
申请公布号
EP1364408(B1)
申请公布日期
2007.05.16
申请号
EP20020700258
申请日期
2002.02.20
申请人
INFINEON TECHNOLOGIES AG
发明人
GOLDBACH, MATTHIAS;HECHT, THOMAS
分类号
H01L27/108;H01L21/8242
主分类号
H01L27/108
代理机构
代理人
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地址
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