| 发明名称 |
Vacuum system has rotary vacuum screw pump, which has intermediate gas inlet, which is connected with second container for production of second operating pressure which is positioned between the main inlet and outlet of vacuum screw pump |
| 摘要 |
<p>Vacuum system has rotary vacuum screw pump (16) which has an intermediate gas inlet (22), which is connected with second container for the production of second operating pressure. Intermediate gas inlet is positioned between the main inlet (20) and outlet (18) of the rotary vacuum screw pump.</p> |
| 申请公布号 |
DE202005021169(U1) |
申请公布日期 |
2007.05.16 |
| 申请号 |
DE20052021169U |
申请日期 |
2005.11.17 |
| 申请人 |
OERLIKON LEYBOLD VACUUM GMBH |
发明人 |
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| 分类号 |
F04C25/00;F04C18/16 |
主分类号 |
F04C25/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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