SUBSTRATE HANDLING DEVICE FOR A CHARGED PARTICLE BEAM SYSTEM,申请号IL20060180105-传众专利搜索

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发明名称	SUBSTRATE HANDLING DEVICE FOR A CHARGED PARTICLE BEAM SYSTEM
摘要
申请公布号	IL180105(D0)	申请公布日期	2007.05.15
申请号	IL20060180105	申请日期	2006.12.17
申请人	NANOBEAM LIMITED	发明人
分类号	H01L;H01L21/677	主分类号	H01L
代理机构		代理人
主权项
地址

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