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发明名称
SUBSTRATREINIGUNGSSYSTEM
摘要
申请公布号
AT360885(T)
申请公布日期
2007.05.15
申请号
AT20010113291T
申请日期
2001.05.31
申请人
S.E.S. COMPANY LIMITED
发明人
OHKURA, RYOICHI;ONO, YUJI;YAMAGUCHI, HIROSHI;TAKAISHI, MIYUKI;KAMIKOCHI, HIDEO
分类号
H01L21/00;H01L21/677;(IPC1-7):H01L21/00
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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