发明名称 VIBRATION-TYPE CANTILEVER HOLDER AND SCANNING PROBE MICROSCOPE
摘要 A vibration-type cantilever holder holds a cantilever opposed to a sample. The holder supports a main body part of the cantilever at only its base end so that a probe at the free end of the cantilever can contact the sample. The holder has a cantilever-attaching stand on which the main body part is placed and fastened such that the cantilever is tilted at a predetermined angle with respect to the sample. A first vibration source is fastened to the cantilever-attaching stand and vibrates with a phase and an amplitude depending on a predetermined waveform signal, and the first vibration source is fastened at a first location to a holder main body. A second vibration source is fastened at a second location, which is spaced from the first location, to the holder main body and generates vibrations to offset vibrations traveling from the first vibration source to the cantilever-attaching stand and holder main body. The holder allows the cantilever to vibrate according to the vibrational characteristics of only the cantilever by counteracting additional vibrations.
申请公布号 KR20070050382(A) 申请公布日期 2007.05.15
申请号 KR20060110783 申请日期 2006.11.10
申请人 SII NANO TECHNOLOGY INC. 发明人 SHIGENO MASATSUGU;IYOKI MASATO
分类号 G01Q60/16;G01B21/30;G01N13/00;G01Q10/04;G01Q60/24;G01Q60/26;G01Q60/32;G01Q60/38;G01Q70/02;G01Q70/04 主分类号 G01Q60/16
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