POLIERSYSTEM UND VERFAHREN ZU SEINER VERWENDUNG,申请号AT20000953960T-传众专利搜索

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发明名称	POLIERSYSTEM UND VERFAHREN ZU SEINER VERWENDUNG
摘要
申请公布号	AT360051(T)	申请公布日期	2007.05.15
申请号	AT20000953960T	申请日期	2000.08.10
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	WANG, SHUMIN;BRUSIC KAUFMAN, VLASTA;GRUMBINE, STEVEN, K.;ZHOU, RENJIE;CHERIAN, ISAAC, K.
分类号	B24B37/00;B24B57/02;B24D11/00;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09G1/02	主分类号	B24B37/00
代理机构		代理人
主权项
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