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发明名称
ZERSTÄUBUNGSVORRICHTUNG MIT EINER KATHODE MIT PERMANENTMAGNETANORDNUNG
摘要
申请公布号
AT361548(T)
申请公布日期
2007.05.15
申请号
AT19990114913T
申请日期
1999.07.30
申请人
APPLIED MATERIALS GMBH & CO. KG
发明人
HAAS, DIETER;KREMPEL-HESSE, JOERG, DR.;BUSCHBECK, WOLFGANG, DR.
分类号
C23C14/34;C23C14/35;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/34
代理机构
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