| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing optical element which prevents a defect formed upon reforming from recombining with oxygen and prevents a hydrogenated carbon film from reacting with oxygen atom and being gasified when the hydrogenated carbon film is optically reformed by energy beam irradiation and, thereby, an optical element is prepared. SOLUTION: In the method of manufacturing optical element, the optical element is manufactured by irradiating a thin film principally comprising at least carbon and hydrogen with light of wavelength less than 700 nm and, thereby, changing optical properties, wherein light irradiation is performed in an environment of reduced pressure 100 Pa or less, or vacuum. Further, in the method of manufacturing optical element, the optical element is manufactured by irradiating a thin film principally comprising at least carbon and hydrogen with light of wavelength less than 700 nm and, thereby, changing optical properties, wherein light irradiation also may be performed in a gas environment in which the sum of an oxygen partial pressure and a water partial pressure is less than 0.1% of the total pressure. COPYRIGHT: (C)2007,JPO&INPIT
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