COMPOUND AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide compounds as raw materials for resist compositions, and to provide a method for producing the compounds.

SOLUTION: The method comprises the following process. A compound is synthesized by condensing a dimethylphenol with bis[4-(t-butoxycarbonylmethyloxy)-3-formyl]diphenylmethane, and the resultant compound is hydrolyzed to obtain the corresponding carboxylic acid. This carboxylic acid and adamantyloxymethyl esters thereof are to be used as raw materials for polymers for resists with slight surface roughness.

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