| 摘要 |
PROBLEM TO BE SOLVED: To inexpensively and efficiently perform processing liquid circulation, processing liquid temperature control, processing replenishing liquid feed, etc. SOLUTION: Flow passages are so constituted as to circulate the washing liquid stored in a washing liquid replenishing tank 136 through a replenishing pipe 146, a cleaning pipe 148A, a circulating pipe 160, and a circulating pipe 156C by driving of a high pressure cleaning pump 150. Circulating pump heads 10D to 10G for transmitting the power (flow force) received from the water flow within the circulating pipe 160 to the processing liquid within the circulating pipes 116 to 122 are installed between the circulating pipes 116 to 122 for circulating the processing liquid of washing tanks 56 to 62 and the circulating pipe 160. COPYRIGHT: (C)2007,JPO&INPIT
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