| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To reduce time for machining the objects to be machined, and to prevent deterioration in the side face shape of the hole to be formed. <P>SOLUTION: A pulse laser beam is emitted from a laser light source 1 is made incident on a pulse chopping means 2. The pulse chopping means 2 chops a plurality of laser pulses separated on a time-base from one original laser pulse of the incident pulse laser beams. A controller 12 memorizes the positions of a plurality of the points to be machined on the objects 10a, 10b to be machined, and controls the laser light source 1, the pulse chopping means 2 and moving mechanisms 11a, 11b in such a manner that the plurality of laser pulses chopped from the first original laser pulse are made incident on the first point to be machined, a plurality of laser pulses chopped from a second original laser pulse emitted after the first original laser pulse are made incident on at least one other point to be machined, and thereafter, a laser pulse chopped from a third original laser pulse emitted after the second original laser pulse is made incident on the first point to be machined. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
