发明名称 SENSOR BLOCK
摘要 A sensor block that includes a plurality of sensor chips in combination. Each sensor chip includes a semiconductor substrate having a detection unit formed therein, and two glass substrates bonded to both sides of the semiconductor substrate. One of the glass substrates is shared among the sensor chips and serves as a base block to support the sensor chips.
申请公布号 US2007102810(A1) 申请公布日期 2007.05.10
申请号 US20060557141 申请日期 2006.11.07
申请人 MITUTOYO CORPORATION 发明人 MATSUMIYA SADAYUKI;TOMINAGA ATSUSHI
分类号 H01L23/34 主分类号 H01L23/34
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