| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a projection exposure device and a projection exposure method for fast carrying a work sheet with high positioning accuracy without causing misalignment, elongation, ripples, wrinkles or the like in the work sheet. <P>SOLUTION: The projection exposure device 1 performing projection exposure by intermittently carrying a work sheet 2 includes an exposure table 4 that can mount and carry the work sheet 2 and a projection exposure unit 10 to perform projection exposure on the work sheet 2 carried by the exposure table 4 to a projection position. The exposure table 4 can move forward and backward by a predetermined stroke along the carrying direction of the work sheet 2 and can hold or release the work sheet 2. The exposure table 4 moves forward while holding the work sheet 2 and moves backward while releasing the work sheet 2 so as to intermittently carry the work sheet 2. <P>COPYRIGHT: (C)2007,JPO&INPIT |
