| 摘要 |
PROBLEM TO BE SOLVED: To provide a reactor which is used for a zinc reduction method of silicon tetrachloride using a high purity gaseous zinc and a high purity gaseous silicon tetrachloride, and with which the purity of a product is maintained and the reaction efficiency and energy efficiency are enhanced. SOLUTION: A reduction reaction is promoted and the efficiency of the reaction is enhanced by providing a heated metal piece, wire or rod or a heat generating ceramic piece, wire, rod or the like in a reaction tube. The energy efficiency is enhanced by keeping the outer wall of the tube warm. Further, the mixing of impurities from the wall of the tube is prevented by depositing a silicon thin film on the inner wall of the tube by setting the temperature of the inner wall of the reaction tube to be≤950°C. COPYRIGHT: (C)2007,JPO&INPIT
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