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发明名称
VORRICHTUNG ZUR PLASMAGESTÜTZTEN BEARBEITUNG VON OBERFLÄCHEN PLANARER SUBSTRATE
摘要
申请公布号
DE50209826(D1)
申请公布日期
2007.05.10
申请号
DE20025009826
申请日期
2002.01.16
申请人
FORSCHUNGS- UND APPLIKATIONSLABOR PLASMATECHNIK GMBH DRESDEN
发明人
KUSKE, JUERGEN;STEPHAN, ULF;KOTTWITZ, ALFRED;SCHADE, KLAUS
分类号
H01L21/00;H05H1/46;C23C16/509;H01J37/32;H01L21/205;H01L21/3065
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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