发明名称 Interferometric cyclic error compensation
摘要 The invention features an interferometry method including: directing two beams derived from a common source along different paths; producing a first output beam derived from a first portion of each of the two beams; producing a second output beam derived from a second portion of each of the two beams; and calculating a product of a first signal derived from the first output beam and a second signal derived from the second output beam.
申请公布号 US6806961(B2) 申请公布日期 2004.10.19
申请号 US20020287898 申请日期 2002.11.05
申请人 ZYGO CORPORATION 发明人 HILL HENRY A.
分类号 G01B9/02;G01B11/00;G03F7/20;H01L21/027;(IPC1-7):G01B9/02 主分类号 G01B9/02
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