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发明名称
COPPER (II) COMPLEXES FOR DEPOSITION OF COPPER FILMS BY ATOMIC LAYER DEPOSITION
摘要
申请公布号
KR20070048215(A)
申请公布日期
2007.05.08
申请号
KR20077004771
申请日期
2007.02.27
申请人
E.I. DU PONT DE NEMOURS AND COMPANY
发明人
BRADLEY ALEXANDER Z.;THOMPSON JEFF S.;PARK, KYUNG HO
分类号
C23C16/18
主分类号
C23C16/18
代理机构
代理人
主权项
地址
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