Micro mirror unit, optical disc drive using same, and method for producing micro mirror unit

摘要

The hinge ( 13 ) should preferably be formed to have a higher resistance than ever against the pivoting of the mirror body ( 12 ) to effectively prevent the hinge ( 13 ) from being damaged. By adopting a suitable one of a variety of production steps as necessary, the hinge ( 13 ) can be formed more finely and with a higher precision and thus the micro mirror unit can be produced more easily in a shorter time. To this end, the hinge ( 13 ) is formed from a different material, such as SiN_x, from the mirror substrate material from which the frame ( 11 ) and mirror body ( 12 ) are formed.