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发明名称
A TRANSPORTATION SYSTEM FOR PROCESSING SEMICONDUCTOR MATERIAL
摘要
申请公布号
KR100717990(B1)
申请公布日期
2007.05.08
申请号
KR20070009820
申请日期
2007.01.31
申请人
INTERNOVA CO., LTD.
发明人
CHO, BO HYEONG;LEE, HYUN O;KIM, BYEONG JO
分类号
H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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