| 摘要 |
The present inveniton provides a substrate feeder including a structure capable of inhibiting problems even in handling thin substrates. The substrate feeder 6 includes a substrate supply reel 10 around which a tapelike substrate 2 to be supplied to a resin applicator 4 and a tapelike spacer 9 are wound in an overlapping state, a spacer take-up reel 38 onto which the spacer 9 separated from the substrate 2 is taken up, and a tension buffering mechanism for alleviating tension of the spacer 9 between the substrate supply reel 10 and the spacer take-up reel 38. |
