发明名称 |
Scanning Microscope With Shape Correction Means |
摘要 |
A scanning probe microscope for measuring a surface shape of a sample by scanning a probe by bringing said probe close to, or into contact with, a sample surface and measuring a physical interaction occurring between the probe and the sample, includes a measurement area specific which specifies a measurement area of the sample on the basis of the image of the sample surface, and a measurement shape corrector which corrects the measurement result of the sample surface on the basis of the condition of the probe.
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申请公布号 |
US2008047334(A1) |
申请公布日期 |
2008.02.28 |
申请号 |
US20070866661 |
申请日期 |
2007.10.03 |
申请人 |
BABA SHUICHI;NAKATA TOSHIHIKO;WATANABE MASAHIRO;ARAI TAKESHI |
发明人 |
BABA SHUICHI;NAKATA TOSHIHIKO;WATANABE MASAHIRO;ARAI TAKESHI |
分类号 |
G01B5/28;G01B21/30;G01Q10/02;G01Q30/02;G01Q30/06;G01Q40/02;G01Q60/18;G01Q60/24;G01Q60/38;H01L21/66 |
主分类号 |
G01B5/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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