发明名称 Method and apparatus for laser annealing
摘要 Numerous embodiments of a method and apparatus for laser annealing are disclosed. In one embodiment, a method of laser annealing includes performing one or more annealing processes on one or more portions of a semiconductor device, where one or more annealing processes performed on one or more portions of the semiconductor device are varied based at least in part on the particular portion of the semiconductor device being annealed, and/or on one or more desirable characteristics of the particular portion of the semiconductor device being annealed.
申请公布号 US7211501(B2) 申请公布日期 2007.05.01
申请号 US20020319310 申请日期 2002.12.12
申请人 INTEL CORPORATION 发明人 LIU MARK Y.;TAYLOR MITCHELL
分类号 H01L21/425;H01L21/268 主分类号 H01L21/425
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