发明名称 Magnetic floating device
摘要 Disclosed is a magnetic floating device in which a movable magnet is sandwiched by fixed magnets in the manner that the same magnetic poles are opposed to each other, such that the movable magnet and the fixed magnets are held relatively movably in a floating direction and an intersecting direction that intersects with a polarization direction of the fixed magnets. The second magnet is placed within a range of extreme value position of a distribution of the magnetic flux density, with respect to the intersecting direction, as produced between the fixed magnets by the fixed magnets, at an opposing surface of the second magnet, being opposed to the fixed magnets. This arrangement assures a large force in the floating direction while making the force in the lateral shift direction weak. Hence, energy consumption of a lateral-direction control mechanism can be reduced significantly.
申请公布号 US7211908(B2) 申请公布日期 2007.05.01
申请号 US20050038671 申请日期 2005.01.19
申请人 CANON KABUSHIKI KAISHA 发明人 TAMAKI MASAYUKI
分类号 G03F7/20;H02K41/00;H01F7/02;H01L21/027;H02K7/09;H02K41/03 主分类号 G03F7/20
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